期刊
ADVANCED SCIENCE
卷 5, 期 5, 页码 -出版社
WILEY
DOI: 10.1002/advs.201700581
关键词
absorbers; complementary metal-oxide semiconductors; CO2; metamaterials; nondispersive infrared sensing; selective
资金
- National University of Singapore (NUS), Singapore [NRF-CRP15-2015-02, WBS: R-263000C24281]
- National Natural Science Foundation of China at NUS (Suzhou) Research Institute, Suzhou, China [61474078]
Application of two major classes of CO2 gas sensors, i.e., electrochemical and nondispersive infrared is predominantly impeded by the poor selectivity and large optical interaction length, respectively. Here, a novel hybrid metamaterial absorber platform is presented by integrating the state-of-the-art complementary metal-oxide-semiconductor compatible metamaterial with a smart, gas-selective-trapping polymer for highly selective and miniaturized optical sensing of CO2 gas in the 5-8 gm mid-IR spectral window. The sensor offers a minimum of 40 ppm detection limit at ambient temperature on a small footprint (20 mu m by 20 mu m), fast response time (approximate to 2 min), and low hysteresis. As a proof-of-concept, net absorption enhancement of 0.0282%/ppm and wavelength shift of 0.5319 nm ppm(-1) are reported. Furthermore, the gas- selective smart polymer is found to enable dual-mode multiplexed sensing for crosschecking and validation of gas concentration on a single platform. Additionally, unique sensing characteristics as determined by the operating wavelength and bandwidth are demonstrated. Also, large differential response of the metamaterial absorber platform for all-optical monitoring is explored. The results will pave the way for a physical understanding of metamaterial-based sensing when integrated with the mid-IR detector for readout and extending the mid-IR functionalities of selective polymers for the detection of technologically relevant gases.
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