Laser-induced fabrication of nanoporous monolayer WS2 membranes

Porous transition metal dichalcogenides (TMDs) are promising candidates for a variety of catalytic, purification, and energy storage applications. Despite recent advances, current fabrication techniques face issues concerning scalability and control over sample porosity. By utilizing water-assisted laser irradiation, we present here a new method for the fabrication of micron-scale, atomically-thin nanoporous tungsten disulfide (WS2) membranes. The electronic and physical structures of the porous membranes are characterized with photoluminescence (PL) spectroscopy and aberration-corrected scanning transmission electron microscopy (AC-STEM), respectively. With increasing laser irradiation dose, we observe a decay of PL signal, and a relative increase in the trion contribution compared to that of the neutral exciton, suggesting defect-related n-type doping and degradation of the membrane. AC-STEM images show the nucleation of tungsten oxide islands on the membrane, and the formation of triangular defect clusters containing a combination of nanopores and oxide-filled regions, providing insight at the atomic level into the photo-oxidation process in TMDs. A linear dependence of the nanoporous area percentage on the laser irradiation dose over the range of 102-105 W cm(-2) is observed. The methods proposed here pave the way for the scalable production of nanoporous membranes through the laser-induced photo-oxidation of WS2 and other transition metal dichalcogenides.