期刊
NANOMATERIALS
卷 8, 期 6, 页码 -出版社
MDPI
DOI: 10.3390/nano8060378
关键词
carbon nanotubes; PECVD; metal alloy; field emission; compact field emission device; X-ray source
类别
资金
- Bio & Medical Technology Development Program of the National Research Foundation (NRF) - Ministry of Science ICT [NRF-2018M3A9E9024942]
- Ministry of SMES and Startups [1425112479]
- Seoul Metropolitan Bio Medical Project [TB170131]
In this study, a simple, efficient, and economical process is reported for the direct synthesis of carbon nanotube (CNT) field emitters on metal alloy. Given that CNT field emitters can be customized with ease for compact and cold field emission devices, they are promising replacements for thermionic emitters in widely accessible X-ray source electron guns. High performance CNT emitter samples were prepared in optimized plasma conditions through the plasma-enhanced chemical vapor deposition (PECVD) process and subsequently characterized by using a scanning electron microscope, tunneling electron microscope, and Raman spectroscopy. For the cathode current, field emission (FE) characteristics with respective turn on (1 mu A/cm(2)) and threshold (1 mA/cm(2)) field of 2.84 and 4.05 V/mu m were obtained. For a field of 5.24 V/mu m, maximum current density of 7 mA/cm(2) was achieved and a field enhancement factor beta of 2838 was calculated. In addition, the CNT emitters sustained a current density of 6.7 mA/cm(2) for 420 min under a field of 5.2 V/m, confirming good operational stability. Finally, an X-ray generated image of an integrated circuit was taken using the compact field emission device developed herein.
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