期刊
MICROMACHINES
卷 9, 期 2, 页码 -出版社
MDPI
DOI: 10.3390/mi9020043
关键词
pressure sensor; piezoresistive sensor; carbon nanotubes; quantum tunneling composite
类别
资金
- Heriot-Watt University
- University of Edinburgh
- Engineering and Physical Sciences Research Council (EPSRC) [EP/K034537/1]
- EPSRC [EP/K034537/1] Funding Source: UKRI
- MRC [MC_PC_15027] Funding Source: UKRI
- Engineering and Physical Sciences Research Council [EP/K034537/1] Funding Source: researchfish
- Medical Research Council [MC_PC_15027] Funding Source: researchfish
Piezoresistive pressure sensors capable of detecting ranges of low compressive stresses have been successfully fabricated and characterised. The 5.5 x 5 x 1.6 mm(3) sensors consist of a planar aluminium top electrode and a microstructured bottom electrode containing a two-by-two array of truncated pyramids with a piezoresistive composite layer sandwiched in-between. The responses of two different piezocomposite materials, a Multiwalled Carbon Nanotube (MWCNT)-elastomer composite and a Quantum Tunneling Composite (QTC), have been characterised as a function of applied pressure and effective contact area. The MWCNT piezoresistive composite-based sensor was able to detect pressures as low as 200 kPa. The QTC-based sensor was capable of detecting pressures as low as 50 kPa depending on the contact area of the bottom electrode. Such sensors could find useful applications requiring the detection of small compressive loads such as those encountered in haptic sensing or robotics.
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