4.4 Article

Cantilever-based microring lasers embedded in a deformable substrate for local strain gauges

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AIP ADVANCES
卷 8, 期 7, 页码 -

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AMER INST PHYSICS
DOI: 10.1063/1.5033365

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资金

  1. Shenzhen Key Laboratory Project [ZDSYS201603311644527]
  2. Shenzhen Fundamental Research Fund [JCYJ20150611092848134, JCYJ20150929170644623]
  3. Shenzhen Science and Technology Innovation Fund [KQCX20140522143114399]
  4. National Natural Science Foundation of China [11474365]

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A cantilever-based microring laser structure was proposed for easily integrating III-V active layer into mechanically stretchable substrates. Local strain gauges were demonstrated by embedding cantilever-based microring lasers in a deformable polymer substrate. The characterizations of microscale local strain gauges had been studied from both simulated and experimental results. The lasing wavelength of strain gauges was blue-shift and linear tuned by stretching the flexible substrate. Gauge factor being similar to 11.5 nm per stretching unit was obtained for a cantilever-based microring laser with structural parameters R=1.25 mu m, W-1=450 nm and W-2=240 nm. Such microring lasers embedded in a flexible substrate are supposed to function not only as strain gauges for monitoring the micro- or nano-structured deformation, but also tunable light sources for photonic integrated circuits. (C) 2018 Author(s).

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