期刊
NATURE COMMUNICATIONS
卷 9, 期 -, 页码 -出版社
NATURE PUBLISHING GROUP
DOI: 10.1038/s41467-018-03388-5
关键词
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资金
- National Natural Science Foundation of China [51290272, 51472008, 61774003, 11327902]
- National Key Research and Development Program of China [2016YFA0200103, 2017YFA0304600, 2017YFA0205700]
- State Key Laboratory of Low-Dimensional Quantum Physics [KF201601]
- Beijing Municipal Science and Technology Commission [Z161100002116020]
- Youth 1000-Talent Program of China
- Shenzhen Basic Research Project [JCYJ20170407155608882]
- Development and Reform Commission of Shenzhen Municipality for the development of the Low-Dimensional Materials and Devices Discipline
Monolayer transition metal dichalcogenides (TMDs) have become essential two-dimensional materials for their perspectives in engineering next-generation electronics. For related applications, the controlled growth of large-area uniform monolayer TMDs is crucial, while it remains challenging. Herein, we report the direct synthesis of 6-inch uniform monolayer molybdenum disulfide on the solid soda-lime glass, through a designed face-to-face metalprecursor supply route in a facile chemical vapor deposition process. We find that the highly uniform monolayer film, with the composite domains possessing an edge length larger than 400 mu m, can be achieved within a quite short time of 8 min. This highly efficient growth is proven to be facilitated by sodium catalysts that are homogenously distributed in glass, according to our experimental facts and density functional theory calculations. This work provides insights into the batch production of highly uniform TMD films on the functional glass substrate with the advantages of low cost, easily transferrable, and compatible with direct applications.
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