期刊
VACUUM
卷 155, 期 -, 页码 408-411出版社
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.vacuum.2018.06.035
关键词
ZnO tubes; MOCVD; Growth temperature; Reactor pressure; Zn-O ratio
资金
- National Key Research and Development Program of China [2016YFB0401702]
- Shenzhen Peacock Team Project [KQTD2016030111203005]
- Shenzhen Innovation Project [JCYJ20160301113356947, JCYJ20160301113537474]
- Southern University of Science and Technology
We have synthesized ZnO tubes, without any catalyst, on Al2O3 (001) substrates by metal organic chemical vapor deposition (MOCVD) at different growth temperatures, pressures and Zn-O ratios. The results confirm that the growth temperature, reactor pressure and Zn-O ratio play important roles in the formation of hexagonal ZnO tubes. Scanning electron microscopy (SEM) images indicated that, at a growth temperature of 500 degrees C, reactor pressure of 75 Torr and Zn-O ratio of 10/75 are an appropriate condition to obtain hexagonal and well-aligned ZnO tubes. High-resolution, double crystal XRD analysis shows a symmetric omega-scan rocking curve, with a full width at half maximum (FWHM) of 1.1 degrees. It confirms the ZnO tubes have highly c-axis orientation on Al2O3 substrate. Subsequently, room temperature photoluminescence (PL) studies confirm that the enhancement of UV emissions from ZnO tubes is due to increasing Zn-O ratios.
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