期刊
EMERGING TECHNOLOGY IN PRECISION ENGINEERING XIV
卷 523-524, 期 -, 页码 40-+出版社
TRANSACTION PUBLISHERS
DOI: 10.4028/www.scientific.net/KEM.523-524.40
关键词
Bragg reflection; Bragg beam splitter; X-ray free-electron laser; plasma chemical vaporization machining; topography; rocking curve; X-ray pump-X-ray probe experiment
资金
- Proposal Program of SACLA Experimental Instruments of RIKEN
- Global COE Program from the Ministry of Education, Sports, Culture, Science and Technology, Japan
- RIKEN
A novel fabrication process was proposed to produce high-quality Bragg beam splitters for hard X-ray free-electron lasers (XFELs), which should consist of thin, bend-free, and robust Bragg-case crystals without any defects. A combination of a mechanical process and plasma chemical vaporization machining was employed. High crystalline perfection of the fabricated Si(110) crystal was verified with X-ray topography and rocking curve measurements. In addition, the thickness was evaluated to be 4.4 mu m from the fringe period of the measured rocking curve. The crystal can be employed in Bragg beam splitters using the (220) Bragg reflection for X-ray pump-X-ray probe experiments with XFEL sources.
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