期刊
SMALL
卷 14, 期 10, 页码 -出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/smll.201703691
关键词
hydrogen sensors; nanosphere lithography; palladium nanoparticles; Si surface texturing; silicon nanowires
类别
资金
- Nano Material Technology Development Program [2015M3A7B7045518]
- National Research Foundation (NRF) of Korea - Ministry of Science, ICT and Future Planning [2017M3D9A1073858]
- Ministry of Oceans and Fisheries, Korea
- National Research Foundation of Korea [2017M3D9A1073863, 2015M3A7B7045446] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
A hydrogen (H-2) gas sensor based on a silicon (Si) nanomesh structure decorated with palladium (Pd) nanoparticles is fabricated via polystyrene nanosphere lithography and top-down fabrication processes. The gas sensor shows dramatically improved H-2 gas sensitivity compared with an Si thin film sensor without nanopatterns. Furthermore, a buffered oxide etchant treatment of the Si nanomesh structure results in an additional performance improvement. The final sensor device shows fast H-2 response and high selectivity to H-2 gas among other gases. The sensing performance is stable and shows repeatable responses in both dry and high humidity ambient environments. The sensor also shows high stability without noticeable performance degradation after one month. This approach allows the facile fabrication of high performance H-2 sensors via a cost-effective, complementary metal-oxide-semiconductor (CMOS) compatible, and scalable nanopatterning method.
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