期刊
SENSORS AND ACTUATORS B-CHEMICAL
卷 270, 期 -, 页码 475-481出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2018.05.072
关键词
Hydrogen sensors; Nanogap arrays; Palladium; Swelling; Epoxy; Polyimide
资金
- NSFC Major Research Plan on Nanomanufacturing [91323303]
- NSFC Funds [51522508]
Hydrogen sensor based on Pd nanogap arrays was fabricated using the swelling induced cracking method. The square hole Pd array is patterned on the polymer to define the position of the nanogaps. We discuss the influence of the size and the shape of the holes on the formed nanogaps. The structural and morphological characteristics of the metal array and the nanogaps were investigated using laser scanning confocal microscopy (LSCM) and scanning electron microscopy (SEM). To illustrate an application of the nanogap structure, the Pd nanogap array was deposited on epoxy and polyimide (PI) substrate and used as H-2 sensor, showing a good sensitivity and stability at room temperature. Moreover, the performance of the nanogap array on PI substrate remains stable after annealing at 80-180 degrees C. This effect is attributed to the high thermal stability of the PI substrate. The effective fabrication method, good sensitivity and the high stability of the Pd nanogap arrays show promising application for H-2 sensing.
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