期刊
SENSORS AND ACTUATORS B-CHEMICAL
卷 258, 期 -, 页码 574-579出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2017.11.132
关键词
Si-MOSFET sensor; MoS2; Humidity sensor; Drift free; Pulse measurement
资金
- Brain Korea 21 Plus Project
- National Research Foundation of Korea [NRF-2016R1A2B3009361]
In this work, we demonstrate the pulse scheme to obtain stable humidity sensing characteristics in Si FET type humidity sensor using MoS2 film as a sensing layer. To investigate the reaction between H2O molecules and MoS2 film, the transfer characteristics (I-D-V-CG) and transient drain current behaviors (I-D-t) are measured in both pMOSFET and nMOSFET sensors by DC measurement. To verify the effect of the pulse scheme, the pulsed I-V (PIV) and the I-D-t are measured as a parameter of relative humidity. The I-D drift of the FET-type sensor is effectively eliminated by applying the pulse to the control-gate (CG) of the FET-type humidity sensor. (c) 2017 Elsevier B.V. All rights reserved.
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