期刊
SENSORS
卷 18, 期 7, 页码 -出版社
MDPI
DOI: 10.3390/s18072301
关键词
microaccelerometer; surface acoustic waves (SAWs); interdigital transducer (IDT); quartz packaging
We suggest a concept design of a SAW-based microaccelerometer with an original triangular-shaped console-type sensing element. Our design is particularly optimized to increase the robustness against positioning errors of the SAW resonators on the opposite sides of the console. We also describe the results of computer simulations and laboratory tests that are in a perfect agreement with each other and present the sensitivity characteristics of a manufactured experimental design device.
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