High Throughput Ion-Implantation for Silicon Solar Cells

Ion implantation is a technique that has been demonstrated to improve solar cell efficiency and eliminate process steps in standard and advanced cell designs. Intevac has developed a high productivity, continuous flux ion implantation tool for solar cells. We demonstrate improved n-type emitters over POCl3 diffused emitters, and selective patterning capabilities. Additionally, it is shown that non-mass analyzed implantation provides similar performance as mass-analyzed implantation, yet at a much lower capital cost. (C) 2012 Published by Elsevier Ltd. Selection and peer-review under responsibility of the scientific committee of the SiliconPV 2012 conference.