期刊
出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.egypro.2012.07.071
关键词
Photovoltaics; Si; PERC; surface passivation; Al2O3; ALD
Atomic layer deposition (ALD) of thin Al2O3 (<= 10 nm) films is used to improve both front and rear surface passivation of large-area screen-printed p-type CZ Si passivated emitter and rear cells (PERC). As emitter passivation, the SiNx anti reflection coating (ARC) is capped with Al2O3, giving improved hydrogenation during co-firing and a front recombination current (J(0,front)) of 128 +/- 5 fA/cm(2). As rear surface passivation, a blister-free stack of Al2O3/SiOx/SiNx is employed, leading to optimal back reflection and a rear recombination current (J(0,rear)) of 92 +/- 6 fA/cm(2). Internal quantum efficiency (IQE) measurements clearly confirm the improved passivation properties of both Al2O3-based stacks, even compared to passivation stacks based on thermally grown SiO2. (C) 2012 Published by Elsevier Ltd. Selection and peer-review under responsibility of the scientific committee of the SiliconPV 2012 conference.
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