期刊
JOURNAL OF NANO RESEARCH
卷 20, 期 -, 页码 109-116出版社
TRANS TECH PUBLICATIONS LTD
DOI: 10.4028/www.scientific.net/JNanoR.20.109
关键词
Tele-nanomanipulation; virtual force feedback; SEM; enhanced virtual coupling
资金
- National Science Fund for Distinguished Young Scholars [50725518]
- National Natural Science Foundation of China [90923041, 51105117]
- Program for New Century Excellent Talents in University [NCET-08-0170]
- Program for Changjiang Scholars and Innovative Research Team in University [IRT0915]
- China Postdoctoral Science Foundation [20100471051]
- State Key Laboratory of Robotics and System (HIT) [SKLRS-2010-MS19]
In this paper, we focus on the need for real time nanomanipulation, a 3D Master/Slave tele-nanomanipulation platform is studied with the haptic device (Omega3) as the master and the nanopositioner (Attocube) as the slave, working in scanning electron microscope (SEM). The 3D manipulation environment is developed with the help of VR technology. The platform is controlled by the enhanced virtual coupling (EVC) algorithm. The stability of the platform is discussed with Llewellyn's stability criteria. Scale factors and enhancement factor of the control system are determined, according to the force applied on master and slave terminals. Performances of the platform are tested with the ZnO nanowire manipulation experiments. Experiment results show that the platform has good performance while guaranteeing stability on ZnO nanowires manipulation in SEM using the method presented in this paper.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据