Virtual Force Feedback-based 3D Master/Slave Tele-nanomanipulation in SEM

In this paper, we focus on the need for real time nanomanipulation, a 3D Master/Slave tele-nanomanipulation platform is studied with the haptic device (Omega3) as the master and the nanopositioner (Attocube) as the slave, working in scanning electron microscope (SEM). The 3D manipulation environment is developed with the help of VR technology. The platform is controlled by the enhanced virtual coupling (EVC) algorithm. The stability of the platform is discussed with Llewellyn's stability criteria. Scale factors and enhancement factor of the control system are determined, according to the force applied on master and slave terminals. Performances of the platform are tested with the ZnO nanowire manipulation experiments. Experiment results show that the platform has good performance while guaranteeing stability on ZnO nanowires manipulation in SEM using the method presented in this paper.