期刊
REVIEW OF SCIENTIFIC INSTRUMENTS
卷 89, 期 2, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.5022279
关键词
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资金
- National High Technology Research and Development of China (863 Program) [2014AA093404]
- Collaborative Innovation Center of Suzhou Nano Science and Technology
In this paper, a SOI (silicon-on-insulator)-based piezoresistive fluid flow sensor is presented; the presented flow sensor mainly consists of a nylon sensing head, stainless steel cantilever beam, SOI sensor chip, printed circuit board, half-cylinder gasket, and stainless steel shell. The working principle of the sensor and some detailed contrastive analysis about the sensor structure were introduced since the nylon sensing head and stainless steel cantilever beam have distinct influence on the sensor performance; the structure of nylon sensing head and stainless steel cantilever beam is also discussed. The SOI sensor chip was fabricated using micro-electromechanical systems technologies, such as reactive ion etching and low pressure chemical vapor deposition. The designed fluid sensor was packaged and tested; a calibration installation system was purposely designed for the sensor experiment. The testing results indicated that the output voltage of the sensor is proportional to the square of the fluid flow velocity, which is coincident with the theoretical derivation. The tested sensitivity of the sensor is 3.91 x 10(-4) V ms(2)/kg. Published by AIP Publishing.
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