期刊
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
卷 215, 期 15, 页码 -出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/pssa.201700964
关键词
light-addressable potentiometric sensors; partially etched structure; spatial resolution
资金
- Japan Science Society
- NEC CC Foundation
In this study, a partially etched structure of a light-addressable potentiometric sensor (LAPS) is fabricated for high-spatial-resolution and high-speed imaging of chemical species. An anisotropic etching process based on tetramethylammonium hydroxide (TMAH) is optimized to fabricate the structure, which strikes a balance between the imaging performance and the mechanical strength of the sensor plate. The etched region of the sensor plate with a thickness of 47 mu m yields a 12-fold enhancement of the photocurrent signal at a high frequency of 120kHz and a 10-fold frequency bandwidth in comparison with the frame region with a thickness of 150 mu m due to the reduced traveling distance of charge carriers inside the semiconductor. This result represents a new approach for high signal-to-noise ratio, high-spatial-resolution, and high-speed measurement.
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