期刊
OPTICS LETTERS
卷 43, 期 9, 页码 2106-2109出版社
OPTICAL SOC AMER
DOI: 10.1364/OL.43.002106
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- Schweizerischer Nationalfonds zur Forderung der Wissenschaftlichen Forschung [163864, 165933]
- Ministry of Education and Science of the Russian Federation (Minobrnauka) [RFMEFI58516X0005]
- Defense Advanced Research Projects Agency (DARPA) [W31P4Q-14-C-0050]
Crystalline optical whispering gallery mode resonators made from alkaline earth fluorides can achieve exceptionally large optical finesse, and are used in a variety of applications, from frequency stabilization and narrow linewidth lasers, to low-noise microwave generation or soliton Kerr frequency combs. Here we demonstrate an efficient coupling method to resonators of these materials, which employs photonic integrated waveguides on a chip based on silicon nitride. By converting a mode from silicon nitride to a free-hanging silica waveguide on a silicon chip, coupling to a crystalline resonator is achieved with a high extinction, while preserving a quality factor exceeding 200 million. This compact, heterogeneous integration of ultra-high Q-factor crystalline resonators with photonic waveguides provides a proof of concept for wafer scale integration and robust, compact packaging for a wide range of applications. (C) 2018 Optical Society of America
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