期刊
OPTICS EXPRESS
卷 26, 期 2, 页码 1573-1585出版社
OPTICAL SOC AMER
DOI: 10.1364/OE.26.001573
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资金
- Air Force Office of Scientific Research (AFOSR) [MURI: FA9550-12-1-0389]
- Charles Stark Draper Laboratory Fellowship
- A*STAR Singapore National Science Scholarship
- National Science Foundation (NSF) [CMMI-1333835, DMR-1420570, ECS-0335765, ECCS-1542081]
- Directorate For Engineering [1333835] Funding Source: National Science Foundation
Optical components, such as lenses, have traditionally been made in the bulk form by shaping glass or other transparent materials. Recent advances in metasurfaces provide a new basis for recasting optical components into thin, planar elements, having similar or better performance using arrays of subwavelength-spaced optical phase-shifters. The technology required to mass produce them dates back to the mid-1990s, when the feature sizes of semiconductor manufacturing became considerably denser than the wavelength of light, advancing in stride with Moore's law. This provides the possibility of unifying two industries: semiconductor manufacturing and lens-making, whereby the same technology used to make computer chips is used to make optical components, such as lenses, based on metasurfaces. Using a scalable metasurface layout compression algorithm that exponentially reduces design file sizes (by 3 orders of magnitude for a centimeter diameter lens) and stepper photolithography, we show the design and fabrication of metasurface lenses (metalenses) with extremely large areas, up to centimeters in diameter and beyond. Using a single two-centimeter diameter near-infrared metalens less than a micron thick fabricated in this way, we experimentally implement the ideal thin lens equation, while demonstrating high-quality imaging and diffraction-limited focusing. (c) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
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