期刊
OPTICS AND LASER TECHNOLOGY
卷 100, 期 -, 页码 298-303出版社
ELSEVIER SCI LTD
DOI: 10.1016/j.optlastec.2017.10.026
关键词
Aspheric microlens array; Digital micromirror device (DMD); Slicing strategy; Non-contact thermal reflow (NCTR)
资金
- Chinese National Natural Science Foundation [51475442]
- Fundamental Research Funds for the Central Universities
A novel fabrication method for high quality aspheric microlens array (MLA) was developed by combining the dose-modulated DMD-based lithography and surface thermal reflow process. In this method, the complex shape of aspheric microlens is pre-modeled via dose modulation in a digital micromirror device (DMD) based maskless projection lithography. And the dose modulation mainly depends on the distribution of exposure dose of photoresist. Then the pre-shaped aspheric microlens is polished by a following non-contact thermal reflow (NCTR) process. Different from the normal process, the reflow process here is investigated to improve the surface quality while keeping the pre-modeled shape unchanged, and thus will avoid the difficulties in generating the aspheric surface during reflow. Fabrication of a designed aspheric MLA with this method was demonstrated in experiments. Results showed that the obtained aspheric MLA was good in both shape accuracy and surface quality. The presented method may be a promising approach in rapidly fabricating high quality aspheric microlens with complex surface. (C) 2017 Elsevier Ltd. All rights reserved.
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