期刊
OPTICAL ENGINEERING
卷 57, 期 4, 页码 -出版社
SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
DOI: 10.1117/1.OE.57.4.041406
关键词
micromechanical devices; magnetophotonic devices; direct laser writing; one-photon absorption
类别
资金
- French National Research Agency (ANR), Investissements d'Avenir program (Labex NanoSaclay) [ANR-10-LABX-0035]
- Vietnam National Foundation for Science and Technology Development (NAFOSTED) [103.03-2015.78]
We have recently demonstrated a simple and low-cost fabrication technique, called low one-photon absorption direct laser writing, to realize desired polymeric microstructures. We present the use of this technique for fabrication of three-dimensional magnetophotonic devices on a photocurable homogeneous nanocomposite consisting of magnetite (Fe3O4) nanoparticles and a commercial SU8 photoresist. The fabricated magnetophotonic microstructures show strong response to an applied external magnetic field. Thus, various three-dimensional submicromechanical magnetophotonic devices, which can be mechanically driven by magnetic force, are designed and created. Potential applications of these devices are also discussed. (C) 2018 Society of Photo-Optical Instrumentation Engineers (SPIE)
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