Multi-dimensional grating interferometer based on fibre-fed measurement heads arranged in Littrow configuration

Industrial application versatility of interferometric encoders increases the urge to measure several degrees of freedom. A novel grating interferometer containing a commercially available, minimized Michelson interferometer and three fibre-fed measurement heads is presented in this paper. Moreover, the arrangement is designed for simultaneous displacement measurements in two perpendicular planes. In the proposed setup, beam splitters are located in the fibre heads, therefore the grating is separated from the light source and the photo detector, which influence measurement results by generated heat. The operating principle of the proposed system as well as error sources influencing measurement results are discussed in this paper. Further, the benefits and shortcomings of the setup are presented. A simple Littrow-configuration-based design leads to a compact-size interferometric encoder suitable for multidimensional measurements.