期刊
SURFACE SCIENCE SPECTRA
卷 20, 期 1, 页码 36-42出版社
AMER INST PHYSICS
DOI: 10.1116/11.20121101
关键词
silicon wafer; native oxide
资金
- Diamond Analytics, a US Synthetic company (Orem, UT)
- Department of Energy's Office of Biological and Environmental Research and located at Pacific Northwest National Laboratory
Silicon (100) substrates are ubiquitous in microfabrication and, accordingly, their surface characteristics are important. Herein, we report the analysis of Si (100) via X-ray photoelectron spectroscopy (XPS) using monochromatic Al K alpha radiation. Survey scans show that the material is primarily silicon and oxygen with small amounts of carbon, nitrogen, and fluorine contamination. The Si 2p region shows two peaks that correspond to elemental silicon and silicon dioxide. Using these peaks the thickness of the native oxide (SiO2) is estimated using the equation of Strohmeier. The oxygen peak is symmetric. These silicon wafers are used as the substrate for subsequent growth of templated carbon nanotubes in the preparation of microfabricated thin layer chromatography plates. (C) 2013 American Vacuum Society.
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