Characterization of All Solid State Batteries with LiPON Thin Films Obtained with Different Substrates and RF Sputtering Times

All-solid-state lithium batteries consisting of LiPON thin films were prepared by radio-frequency (RF) magnetron sputtering, and the influences of substrates and RF sputtering times have been investigated. For the preparation with different substrates, the Cu, Mo, Al and FTO (SnO2: F) were chosen to grow LiPON films, respectively. The results indicate that the small particles of FTO-sub film can aggregate together and form the particles clusters, which contribute to a fairly rough surface and high discharge capacity of the lithium cell during the cycle test. For the preparation with different sputtering times, the 0.5, 1.0, 1.5 and 2.0 hours are taken to evaluate the characteristics and electrochemical properties of the films, respectively. The results show that long sputtering time (1.5 and 2.0 h) could prevent the formation of polycrystalline phases, which may increase the capacity of all-solid-state Li+ battery.