期刊
18TH MICROSCOPY OF SEMICONDUCTING MATERIALS CONFERENCE (MSM XVIII)
卷 471, 期 -, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/1742-6596/471/1/012026
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The growing demand for wireless multimedia applications (smartphones, tablets, digital cameras) requires the development of devices combining both high speed performances and low power consumption. A recent technological breakthrough making a good compromise between these two antagonist conditions has been proposed: the 28-14nm CMOS transistor generations based on a fully-depleted Silicon-on-Insulator (FD-SOI) performed on a thin Si film of 5-6nm. In this paper, we propose to review the TEM characterization challenges that are essential for the development of extremely power-efficient System on Chip (SoC).
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