期刊
LASER & PHOTONICS REVIEWS
卷 12, 期 6, 页码 -出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/lpor.201700300
关键词
electro-optic polymers; optical modulators; ring resonators; silicon photonics; sub-wavelength grating
资金
- Department of Energy (DOE) [DE SC-0013178]
- Air Force Office of Scientific Research (AFOSR) Small Business Innovation Research (SBIR) [FA9550-16-C-0033]
Silicon-organic hybrid integrated devices show great potential in high-speed optical interconnects and sensors. In this paper, a high-speed modulator based on an electro-optic (EO) polymer (SEO125) infiltrated sub-wavelength grating (SWG) waveguide ring resonator is presented. The core of the SWG waveguide consists of periodically arranged silicon pillars along the light propagation direction, which provides large mode volume overlap with EO polymer. The optimized SWG shows a mode volume overlap of 36.2% with a silicon duty cycle of 0.7. The 3-dB modulation bandwidth of the fabricated modulator is measured to be larger than 40 GHz occupying an area of 70 mu m x 29 mu m, which is the largest bandwidth and the most compact footprint that has been demonstrated for ring resonators on the silicon-organic hybrid platform.
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