期刊
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
卷 36, 期 3, 页码 -出版社
A V S AMER INST PHYSICS
DOI: 10.1116/1.5024314
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资金
- Swedish Research Council (VR) [621-2013-5585]
- Carl Tryggers Stiftelse [12:175]
- Swedish Foundation for Strategic Research [SSF IS-14-0024]
- Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linkoping University [SFO-Mat-LiU 2009-00971]
Boron nitride (BN) as a thin film is promising for many future electronic applications. On 0001 alpha-Al2O3 and 0001 4H/6H-SiC substrates, chemical vapor deposition yields epitaxial sp(2)-hybridized BN (sp(2)-BN) films oriented around the c-axis. Here, the authors seek to point out that sp(2)-BN can form two different polytypes; hexagonal BN (h-BN) and rhombohedral BN (r-BN), only differing in the stacking of the basal planes but with the identical distance between the basal planes and in-plane lattice parameters. This makes structural identification challenging in c- axis oriented films. The authors suggest the use of a combination of high-resolution electron microscopy with careful sample preparation and thin film x-ray diffraction techniques like pole figure measurements and glancing incidence (in-plane) diffraction to fully distinguish h-BN from r-BN. (C) 2018 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license.
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