3.8 Proceedings Paper

Use of a CNT-coated piezoelectric cantilever with double transduction as a gas sensor for benzene detection at room temperature

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ELSEVIER SCIENCE BV
DOI: 10.1016/j.proeng.2014.11.636

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piezoelectric cantilever; double transduction; CNTs; 31-longitudinal mode; chemical gas sensor; benzene

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In this work, we propose to use a screen-printed piezoelectric cantilever with double transduction. Indeed, the piezoelectric cantilever is used as a resonant type sensor coated with carbon nanotubes (CNTs) as sensitive layer. Then, the resistance of CNTs is measured in static mode in parallel thanks to a modification of the cantilever top electrode. The combination of the CNTs equilibrium conductivity measurement and the resonance frequency shift of the 31-longitudinal mode allows the use of this device as a chemical gas sensor for benzene detection. The responses towards benzene concentrations under different relative humidity backgrounds are discussed. (C) 2014 The Authors. Published by Elsevier Ltd.

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