期刊
28TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS (EUROSENSORS 2014)
卷 87, 期 -, 页码 708-711出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.proeng.2014.11.636
关键词
piezoelectric cantilever; double transduction; CNTs; 31-longitudinal mode; chemical gas sensor; benzene
In this work, we propose to use a screen-printed piezoelectric cantilever with double transduction. Indeed, the piezoelectric cantilever is used as a resonant type sensor coated with carbon nanotubes (CNTs) as sensitive layer. Then, the resistance of CNTs is measured in static mode in parallel thanks to a modification of the cantilever top electrode. The combination of the CNTs equilibrium conductivity measurement and the resonance frequency shift of the 31-longitudinal mode allows the use of this device as a chemical gas sensor for benzene detection. The responses towards benzene concentrations under different relative humidity backgrounds are discussed. (C) 2014 The Authors. Published by Elsevier Ltd.
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