期刊
JOURNAL OF PHYSICS D-APPLIED PHYSICS
卷 51, 期 33, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/1361-6463/aad265
关键词
interferometry; velocimetry; vibration analysis; microscopy; metrology
A fast and compact system design concept for parallel phase shift interferometry systems is presented and demonstrated for several applications such as high performance vibrometry, dynamic focus tracking and surface profiling with sub-nm accuracy. The unique system design allows the easy generation and simultaneous acquisition of three phase shifted interference signals utilized for axial position tracking, using a segmented waveplate mask aligned over a single off-the-shelf quadrant detector. This design is superior to common designs in simplicity and compactness, is cost effective, power efficient, inherently easier to calibrate and is thus more robust allowing superior system performance.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据