期刊
JOURNAL OF PHYSICS D-APPLIED PHYSICS
卷 51, 期 23, 页码 -出版社
IOP Publishing Ltd
DOI: 10.1088/1361-6463/aac080
关键词
titanium dioxide; anatase; HiPIMS; magnetron sputtering; thin film
资金
- French National Center for Scientific Research (CNRS)
- Brazilian National Council of Scientific and Technological Development (CNPq, 'Ciencia sem Fronteiras') [233194/2014-2]
- FAPESP [2012/10127-5]
- Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linkoping University [SFO-Mat-LiU, 2009-00971]
- Swedish Research Council [VR 621-2014-4882]
High power impulse magnetron sputtering (HiPIMS) has already demonstrated great potential for synthesizing the high-energy crystalline phase of titanium dioxide (rutile Ti-O2) due to large quantities of highly energetic ions present in the discharge. In this work, it is shown that the metastable anatase phase can also be obtained by HiPIMS. The required deposition conditions have been identified by systematically studying the phase formation, microstructure and chemical composition as a function of mode of target operation as well as of substrate temperature, working pressure, and peak current density. It is found that films deposited in the metal and transition modes are predominantly amorphous and contain substoichiometric TiOx compounds, while in compound mode they are well-crystallized and present only O2- ions bound to Ti4+, i.e. pure TiO2. Anatase TiO2 films are obtained for working pressures between 1 and 2 Pa, a peak current density of similar to 1 A cm(-2) and deposition temperatures lower than 300 degrees C. Rutile is favored at lower pressures (< 1 Pa) and higher peak current densities (>2 A cm(-2)), while amorphous films are obtained at higher pressures (greater than or similar to 5 Pa). Microstructural characterization of selected films is also presented.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据