期刊
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
卷 28, 期 10, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/1361-6439/aad2fd
关键词
humidity sensor; Lamb wave; aluminum nitride; resonant sensor; graphene oxide
类别
资金
- National Natural Science Foundation of China [51475423]
- Science Fund for Creative Research Groups of National Natural Science Foundation of China [51521064]
- Fundamental Research Funds for the Central Universities
A high-performance humidity sensor based on an AlN (aluminum nitride) Lamb wave resonator coated with graphene oxide (GO) is presented in this paper. With the porous structure and oxygen-containing groups of GO as the sensing layer, the humidity sensor exhibits a high sensitivity of 26kHz/%RH at 10%-90% relative humidity. However, more than half of the frequency variation occurs in the range of 70%RH to 90%RH. In this paper, we propose a vacuum film-coating method to improve the performance of the GO film. With this GO film, the sensitivity is increased by 160% in the humidity range between 10% to 60%RH compared to conventional ones. The sensor also demonstrates a low temperature coefficient of frequency, small hysteresis, and short response (similar to 9s)/recovery (similar to 11s) time. Therefore, the humidity sensor with GO shows great potential in practical applications.
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