期刊
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
卷 27, 期 1, 页码 59-72出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2017.2778307
关键词
Mechanically-coupled array; high Q; II-BAR; fully-differential; balanced measurement; MEMS resonator and oscillator; thermal actuation; piezoresistive sensing
类别
资金
- Ministry of Science and Technology (MOST) of Taiwan [MOST-105-2622-E-007-002-CC2]
A mechanically coupled array technique to enable a fully differential operation of single-crystal silicon thermalpiezoresistive resonators (TPRs) has been demonstrated to alleviate resistive feedthrough issues often seen in TPRs, therefore, featuring clear resonance behavior with decent signal-to-feedthrough ratio. The proposed thermal-piezoresistive dual-IIBARs exhibits feedthrough reduction of more than 67 dB, and no spurious mode, is found within a wide frequency span. The resonator array together with board-level sustaining circuitry also works as a thermal-piezoresistive oscillator (TPO) and demonstrated its performances for real-time mass sensing. Finally, the proposed TPO mass sensor possesses several key features, including real-time monitoring, fast response time, and most importantly, excellent mass resolution of only 83 fg extracted from the measured TPO's Allan deviation. [2017-0085]
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