期刊
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
卷 27, 期 3, 页码 472-478出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2018.2819994
关键词
3D printing; miniaturization; micro-bellows membrane; microfabrication; micro device; Parylene C.
类别
资金
- King Abdullah University of Science and Technology
Bellows membranes are essential elements in many actuator devices. Currently, the size, shape, and dimensions of bellows membranes are limited by the fabrication process constraints. Miniaturizing the bellows membranes is a prerequisite for the development of integrated systems with novel capabilities as needed, for example, in advanced biomedical devices. Using a two-photon polymerization, 3-D printing technique, we present a high-resolution, high-yield, and customizable manufacturing process to produce Parylene C micro-bellows. An optimization of the crucial design parameters is performed using finite element modeling from which designs with high deflection and low stress were obtained. Different micro-bellows designs are fabricated and characterized. The total volume of the fabricated models ranges from 3 to 0.3 mm(3) and the minimum feature size is 60 mu m. The achieved cumulative deflection ranges from 300 to 570 mu m.
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