Structural changes in ZrOxNy/ZrO2 coatings deposited through spray pyrolisis-nitriding

Thin films of zirconium oxynitride were deposited on stainless steel 316L and characterized through ultrasonic spray pyrolysis-nitriding (UPS-N). Initially, thin films of ZrO2 are deposited using ultrasonic spray pyrolysis, and later ZrO2 films were nitrided in a NH3 atmosphere. We analyzed the effect of some variables, such as substrate temperature, flow ratio, and time of the production of coatings and their influence on the structure of the films. The characterization was carried out using X-ray diffraction (XRD) spectroscopy, X-ray photoelectron (XPS), and scanning electron microscopy (SEM). Films that were grown using the UPS method exhibited a tetragonal zirconia Polycrystalline structure with preferential orientation in plane (101). These films, after being nitrided in an atmosphere of anhydrous ammonia at 1023 K, go through two processes: a phase transition from tetragonal to monoclinic, and later the formation of zirconium oxynitride rhombohedral ZrOxNy.