期刊
JOURNAL OF INDUSTRIAL AND ENGINEERING CHEMISTRY
卷 65, 期 -, 页码 72-81出版社
ELSEVIER SCIENCE INC
DOI: 10.1016/j.jiec.2018.04.014
关键词
Aramid; Rejection; Pore size; Gold colloids; Pd-PVP nanoparticles
资金
- National Research Foundation of Korea (NRF) Grant - Korean Government (MSIP) [NRF-2015R1A5A7037825]
- MOTIE (Ministry of Trade, Industry and Energy) [10048995]
- KSRC (Korea Semiconductor Research Consortium)
For the efficient particle removal in an aged semiconductor photoresist solution, a nylon membrane having micro-sized pores was modified into membranes having nano-sized pores. Polyethylene(co-vinyl alcohol) and aramid were used as pore fillers to modify the membrane. The removable capability of soft and hard nano-colloids was systematically investigated. Porosity minimization, improved rejection efficiency, solvent resistance, and enhanced wettability were observed at the modified nylon composite membranes. The aramid pore-filled membrane showed higher rejection (>95%) than the virgin or the EVOH modified membrane, showing good feasibility for use as a separator for particle removal in a semiconductor process. (C) 2018 The Korean Society of Industrial and Engineering Chemistry. Published by Elsevier B.V. All rights reserved.
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