期刊
JOURNAL OF CRYSTAL GROWTH
卷 483, 期 -, 页码 223-227出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.jcrysgro.2017.12.010
关键词
Line defects; Point defects; Liquid phase epitaxy; Germanium silicon alloys
Si0.973Ge0.027 epilayers were grown on a Si (0 0 1) substrate by a lateral liquid-phase epitaxy (LLPE) technique. The lateral growth mechanism favoured the glide of misfit dislocations and inhibited the nucleation of new dislocations by maintaining the thickness less than the critical thicknesses for dislocation nucleation and greater than the critical thickness for glide. This promoted the formation of an array of long misfit dislocations parallel to the [110] growth direction and reduced the threading dislocation density to 103 cm(-2), two orders of magnitude lower than the seed area with an isotropic misfit dislocation network. (C) 2017 Elsevier B.V. All rights reserved.
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