4.6 Article Proceedings Paper

Investigation of thermal and optical properties on polysilicon by the photothermal deflection technique

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JOURNAL OF APPLIED PHYSICS
卷 123, 期 16, 页码 -

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AMER INST PHYSICS
DOI: 10.1063/1.4986514

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In this paper, a method is described to study the geometry and thermal properties of grain boundaries in a polysilicon sample. This method is based on the Photothermal Deflection Technique called Photothermal Imaging. In order to be able to heat the sample by a very low laser beam power (2mW), the sample is immersed in a cell filled with paraffin oil. The comparison of the experimental curves of amplitude and phase of the photothermal signal variations versus the displacement x of the sample to the corresponding theoretical ones allows obtaining thermal properties of the grain boundaries and their dimension. Published by AIP Publishing.

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