期刊
JAPANESE JOURNAL OF APPLIED PHYSICS
卷 57, 期 5, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.7567/JJAP.57.05GC04
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资金
- National Research Foundation of Korea - Korean Government (Ministry of Science, ICT and Future Planning) [NRF-2016R1A2B4016361]
- National Research Foundation of Korea [2016R1A2B4016361] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
Unlike lithography-based processes, printed electronics does not require etching, which makes it difficult to fabricate electronic devices with an air gap. In this study, we propose a method to fabricate capacitive air-gap touch sensors via printing and coating. First, the bottom electrode was fabricated on a flexible poly(ethylene terephthalate) (PET) substrate using roll-to-roll gravure printing with silver ink. Then poly(dimethylsiloxane) (PDMS) was spin coated to form a sacrificial layer. The top electrode was fabricated on the sacrificial layer by spin coating with a stretchable silver ink. The sensor samples were then put in a tetrabutylammonium (TBAF) bath to generate the air gap by removing the sacrificial layer. The capacitance of the samples was measured for verification, and the results show that the capacitance increases in proportion to the applied force from 0 to 2.5N. (C) 2018 The Japan Society of Applied Physics
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