Semi-analytical model for a static sheath including a weakly collisional presheath

A semi-analytical static sheath (SASS) model can provide a spatial potential profile on a biased surface with microstructures, which can be used for predicting ion trajectories on the surface. However, two- or three-dimensional SASS models require a search procedure for a sheath edge equipotential profile, at which ions have the Bohm velocity, as the starting positions for calculating ion trajectories. This procedure can be troublesome when surface microstructures have complex structures. This difficulty is due to the fact that the SASS model cannot handle a presheath region. In this work, we propose a modified SASS model that can handle a presheath region. By using the modified SASS model, ion trajectories can be calculated from edges with arbitrary geometry without searching for the equipotential profile corresponding to sheath edges. (C) 2018 The Japan Society of Applied Physics.