4.5 Article Proceedings Paper

Spectroscopic study of La2O3 thin films deposited by indigenously developed plasma-enhanced atomic layer deposition system

相关参考文献

注意:仅列出部分参考文献,下载原文获取全部文献信息。
Article Nanoscience & Nanotechnology

Silicon diffusion control in atomic-layer-deposited Al2O3/La2O3/Al2O3 gate stacks using an Al2O3 barrier layer

Xing Wang et al.

NANOSCALE RESEARCH LETTERS (2015)

Article Chemistry, Physical

Total conductivity in Sc-doped LaTiO3+δ perovskites

M. Bradha et al.

IONICS (2014)

Article Materials Science, Multidisciplinary

Sol-gel deposited ceria thin films as gate dielectric for CMOS technology

Anil G. Khairnar et al.

BULLETIN OF MATERIALS SCIENCE (2013)

Article Engineering, Electrical & Electronic

Atomic layer deposition for photovoltaics: applications and prospects for solar cell manufacturing

J. A. van Delft et al.

SEMICONDUCTOR SCIENCE AND TECHNOLOGY (2012)

Article Engineering, Electrical & Electronic

Electrical properties of atomic-layer-deposited La2O3 films using a novel La formamidinate precursor and ozone

B. Lee et al.

MICROELECTRONIC ENGINEERING (2009)

Review Computer Science, Information Systems

Challenges of 22 nm and beyond CMOS technology

Huang Ru et al.

SCIENCE IN CHINA SERIES F-INFORMATION SCIENCES (2009)

Article Engineering, Electrical & Electronic

Silicon carbide benefits and advantages for power electronics circuits and systems

A Elasser et al.

PROCEEDINGS OF THE IEEE (2002)