期刊
INTERNATIONAL JOURNAL OF HEAT AND MASS TRANSFER
卷 117, 期 -, 页码 1083-1098出版社
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.ijheatmasstransfer.2017.10.084
关键词
Joule heating process; Thermal stresses; Alternating current; High frequency; Siemens reactor
资金
- National Natural Science Foundation of China [21566015]
- China Postdoctoral Science Foundation [2017M613281XB]
- Applied Basic Research Projects of Yunnan [2015FB126]
- NSFC, China
- Kunming Yeyan New-Material Co., Ltd
We perform numerical simulations to study effects of alternating current (AC) frequency on thermal stress evolution during the Joule heating process in a 48-rod Siemens reactor. The characteristics of temperature, current density, and stress distributions within the rods located in different rings are analyzed first. A Joule heating model using AC is then proposed for flexible power adjustment. The voltage-current curves are obtained from analysis of rod radius, location, and skin depth, as well as the properties of the polysilicon. The results indicate that, during the Joule heating process, large stresses typically occur in the central regions of the silicon rods. The highest stress occurs at the center of the silicon rods located in the outer ring when a standard power frequency of 50 Hz is utilized. The results further indicate that von Mises stress significantly decreases as AC frequency increases. Additionally, we propose a novel Joule heating method that is useful for producing larger high-purity polycrystalline silicon rods by considering both low frequency and high frequency power. Based on an analysis of energy consumption during the Joule heating process, we recommend optimized power supplies for the 48-rod Siemens reactor. (C) 2017 Elsevier Ltd. All rights reserved.
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