期刊
出版社
SPIE-INT SOC OPTICAL ENGINEERING
DOI: 10.1117/12.2055475
关键词
Gratings; diamond; coronagraphy; microfabrication
The Annular Groove Phase Mask (AGPM) is a circularly symmetric half wave plate consisting of a circular high aspect ratio sub-wavelength grating. Here we present a method for realizing such structures in diamond. To improve the AGPM performance, antireflective sub-wavelength gratings are etched on the backside of the components, and such gratings are also discussed. Components for the N-band (around 10 mu m) and the L-band (around 3.8 mu m) have been successfully fabricated. We are currently developing the process further to improve the precision of the gratings and produce an AGPM for the K-band (around 2.2 mu m).
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