期刊
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT
卷 67, 期 3, 页码 715-721出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TIM.2017.2784082
关键词
Humidity sensor; planar capacitance; quartz crystal; resonant sensor; stability
资金
- National Natural Science Foundation of China [61471305, 61731016]
- Science and Technology Support Program of Sichuan Province [2016JZ0028]
In this paper, a quartz crystal resonator (QCR) with high quality factor and a humidity-sensitive capacitor were combined to fabricate a high-sensitivity and good-stability humidity sensor. Through the humidity sensor, the perturbation of the humidity-sensitive capacitor which was caused by different humidity levels could be transformed into the deviation of the resonant frequency of the QCR. The expression between the resonant frequency of the sensor and relative humidity was derived. The test curve of the resonant frequency responses of the sensor versus relative humidity changes was measured and showed a similar trend to the theoretical result. In addition, the influences of different sensitive materials on the sensor performance have also been researched. And the humidity sensors exhibited a high sensitivity (116.2 Hz/% RH) and a good stability with 0.038-Hz standard deviation of the output frequency in the range of 11.13% RH-97.3% RH. The properties of humidity hysteresis as well as response and recovery have also been investigated.
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