期刊
ACS APPLIED MATERIALS & INTERFACES
卷 7, 期 48, 页码 26522-26529出版社
AMER CHEMICAL SOC
DOI: 10.1021/acsami.5b07709
关键词
native oxide layer; epitaxial growth barrier; H-2 plasma; microstructural evolution; surface passivation
资金
- Main Direction Program of Knowledge Innovation of the Chinese Academy of Sciences [KGCX2-YW-399+11]
- National High Technology Research and Development Program of China (863 Program) [2011AA050501]
The interface microstructure of a silicon heterojunction (SHJ) solar cell was investigated. We found an ultrathin native oxide layer (NOL) with a thickness of several angstroms was formed on the crystalline silicon (c-Si) surface in a very short time (similar to 30 s) after being etched by HF solution. Although the NOL had a loose structure with defects that are detrimental for surface passivation, it acted as a barrier to restrain the epitaxial growth of hydrogenated amorphous silicon (a-Si:H) during the plasma-enhanced chemical vapor deposition (PECVD). The microstructure change of the NOL during the PECVD deposition of a-Si:H layers with different conditions and under different H-2 plasma treatments were systemically investigated in detail. When a brief H-2 plasma was applied to treat the a-Si:H layer after the PECVD deposition, interstitial oxygen and small-size SiO2 precipitates were transformed to hydrogenated amorphous silicon suboxide alloy (a-SiOx:H, x similar to 1.5). In the meantime, the interface defect density was reduced by about 50%, and the parameters of the SHJ solar cell were improved due to the post H-2 plasma treatment.
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