期刊
IEEE SENSORS JOURNAL
卷 18, 期 1, 页码 61-68出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSEN.2017.2767539
关键词
Interferometry; intraocular pressure; glaucoma; pressure measurement; pressure sensors; silicon nitride
资金
- Glaucoma Research Foundation under GRF Grant
- National Science Foundation [IIP-1556342]
This paper studies the design and application of an interferometric sensor system intended for measuring intraocular pressure. The system consists of a hermetically sealed, biocompatible, wireless, and powerless interferometric pressure sensor and a portable handheld reader. The interferometric pressure sensor consists of a 200 nm silicon nitride diaphragm, a 10 mu m SU-8 spacer, and a 200 mu m glass substrate. As monochromatic light is directed towards the sensor cavity, interference fringes between the silicon nitride diaphragm and the glass substrate form as a function of the applied pressure. In-vitro measurements show pressure in the range of 0-60 mmHg can be determined reliably with an accuracy of +/- 0.3 mmHg, while ex-vivo experiments using rabbit cornea showed an accuracy of +/- 0.6 mmHg. The resolution of the sensor is 0.2 mmHg. These results demonstrate the ability of the system to measure small changes in pressure, including intraocular pressure of glaucoma patients.
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