期刊
IEEE PHOTONICS TECHNOLOGY LETTERS
卷 30, 期 15, 页码 1388-1391出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LPT.2018.2849641
关键词
Liquid crystal devices; tunable optical filter; wafer-scale fabrication; nanoimprint; grating; dry thick resist film; soft transfer; SU-8; VCSEL
资金
- French National Research Agency (ANR) [ANR-14-ASTR-0007 HYPOCAMP, ANR-15-CE19-0012 DOCT VCSEL]
A simple technology is demonstrated for the wafer-scale fabrication of liquid-crystal (LC) microcells that can be integrated in active optoelectronic devices. Fabrication of 1.55-mu m tunable Fabry-Perot optical micro-filter arrays is achieved owing to the insertion of a single nanoimprinted polymer grating dedicated to LC alignment and to the soft thermal transfer of a dry thick resist film between two highly reflective mirrors. The filter exhibits a spectral tuning range of 102 nm with only 18 V applied, as well as negligible internal loss, which makes it suitable for being inserted in a laser cavity. This constitutes a key step toward the large-scale integration of widely tunable photonic devices such as vertical-cavity surface-emitting lasers using LC technology.
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