期刊
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS
卷 24, 期 4, 页码 -出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSTQE.2018.2808258
关键词
Optical waveguides; optical losses; optical resonators
资金
- Defense Advanced Research Projects Agency, Defense Sciences Office [HR0011-15-C-0055, W31P4Q-16-1-0002]
- Swiss National Science Foundation [161573]
- European Union [737639]
- European Research Council (ERC) [737639] Funding Source: European Research Council (ERC)
We report on fabrication of high-confinement and low loss silicon nitride (Si3N4) waveguides using the photonic Damascene process. This process scheme represents a novel fabrication approach enabling reliable, wafer-scale fabrication of high-confinement optical waveguides. A reflow step of the silica preform reduces sidewall scattering to values not attainable with conventional etching, and reduces losses and backscattering significantly, resulting in a waveguide attenuation of 5.5 dB/m. We discuss the critical aspects of the process in detail and demonstrate the fabrication of high stress Si3N4 waveguides with unprecedentedly large dimensions (1.75 mu m x 1.425 mu m) providing high-confinement at mid-infrared wavelengths. A device characterization strategy allowing for systematic extraction of statistically relevant loss values is discussed and reveals the effects of the sidewall smoothing.
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