4.6 Article

Suppression of the Backgating Effect of Enhancement-Mode p-GaN HEMTs on 200-mm GaN-on-SOI for Monolithic Integration

期刊

IEEE ELECTRON DEVICE LETTERS
卷 39, 期 7, 页码 999-1002

出版社

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2018.2833883

关键词

p-GaN; HEMT; backgating effect; GaN-on-SOI; half-bridge; monolithic integration

资金

  1. Electronic Component Systems for European Leadership Joint Undertaking through the Project PowerBase [662133]
  2. European Union's Horizon 2020 Research and Innovation Programme

向作者/读者索取更多资源

The backgating effect on trench-isolated enhancement-mode p-GaN devices fabricated on 200-mm GaN-on-SOI was investigated. We show that to minimize the backgating effect in the monolithically integrated half-bridge, the sources of both the low side and high side need to be connected to their respective fully isolated Si(111) device layers to keep the substrates and the sources at equipotential.

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