期刊
IEEE ELECTRON DEVICE LETTERS
卷 39, 期 2, 页码 288-291出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2017.2784538
关键词
Pressure sensor; flexible; hysteresis; sensitivity
资金
- National Key Research and Development program of China [2017YFA0206301]
- National Natural Science Foundation of China [61674078, 1157436]
- Jiangsu Natural Science Foundation [BK20130055]
- PAPD program
Flexible pressure sensors are crucial for E-skins to enable tactile sensing capabilities. However, flexible pressure sensors often exhibit high hysteretic response caused by internal and external mechanical dissipations in flexible materials. The hysteresis gives rise to reliability issues, especially in the presence of dynamic stress. In this letter, we report a flexible capacitive pressure sensor design with hierarchically microstructured electrodes to obtain both high sensitivity and low hysteresis. The sparselyspacedlarge pyramidmicrostructureimproves the sensitivity, whereas the small pyramid reduces the hysteresis caused by interfacial adhesion. The optimized sensor shows excellent performances in terms of high sensitivity (similar to 3.73 kPa(-1)), ultralow detection limits (0.1 Pa), significantly reduced hysteresis (similar to 4.42%), and enhanced sensing capability for pluses, which demonstrates its potential for advanced electronic skins.
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