期刊
JOURNAL OF SEMICONDUCTORS
卷 36, 期 7, 页码 -出版社
IOP Publishing Ltd
DOI: 10.1088/1674-4926/36/7/073001
关键词
ZnO thin film; growth temperature; optical; acetone sensing properties
资金
- Dong-Eui University Grant [2014AA342]
Zinc oxide (ZnO) thin films were prepared onto glass substrates at moderately low growth temperature by two-stage spray pyrolysis technique. The effects of growth temperature on structural, optical and acetone detection properties were investigated with X-ray diffractometry, a UV-visible spectrophotometer, photoluminescence (PL) spectroscopy and a homemade gas sensor testing unit, respectively. All the films are polycrystalline with a hexagonal wurtzite phase and exhibit a preferential orientation along [002] direction. The film crystallinity is gradually enhanced with an increase in growth temperature. The optical measurements show that all the films are physically highly transparent with a transmittance greater than 82% in the visible range. The band gap of the film is observed to exhibit a slight red shift with an increasing growth temperature. The PL studies on the films show UV/ violet PL band at similar to 395 nm. Among all the films investigated, the film deposited at 250 degrees C demonstrates a maximum sensitivity of 13% towards 20 ppm of acetone vapors at 300 degrees C operating temperature.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据